An InSAR analysis approach for identifying and extracting the temporarily coherent points (TCP) that exist between two SAR acquisitions and for determining motions of the TCP is presented for applications such as ground settlement monitoring. TCP are identified based on the spatial characteristics of the range and azimuth offsets of coherent radar scatterers. A method for coregistering TCP based on the offsets of TCP is given to reduce the coregistration errors at TCP. An improved phase unwrapping method based on the minimum cost flow (MCF) algorithm and local Delaunay triangulation is also proposed for sparse TCP data. The proposed algorithms are validated using a test site in Hong Kong. The test results show that the algorithms work satisfactorily for various ground features.